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ASTM E2444-11e1
Terminology Relating to Measurements Taken on Thin, Reflecting Films
2 стр.
Заменен
Печатное изданиеЭлектронный (pdf)
84.24 $ (включая НДС 20%)
Разработчик:
Зарубежные/ASTM
ICS:
31.240 Mechanical structures for electronic equipment / Механические конструкции электронного оборудования, 01.040.31 Electronics (Vocabularies) / Электроника (Словари)
Сборник (ASTM):
03.01 Metals -- Mechanical Testing; Elevated and Low-Temperature Tests; Metallography / Металлы - Механические испытания, Испытания при высоких и низких температурах, Металлография
Тематика:
Fatigue & Fracture
Описание
Область применения

1.1 This standard consists of terms and definitions pertaining to measurements taken on thin, reflecting films, such as found in microelectromechanical systems (MEMS) materials. In particular, the terms are related to the standards in Section 2, which were generated by Committee E08 on Fatigue and Fracture. Terminology E1823 Relating to Fatigue and Fracture Testing is applicable to this standard.

1.2 The terms are listed in alphabetical order.

Ключевые слова:
cantilevers; definitions; fixed-fixed beams; interferometry; length measurements; microelectromechanical systems; MEMS; polysilicon; residual strain; stiction; strain gradient; terminology; test structure