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BS ISO 14237:2000
Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials
22 стр.
Заменен
Печатная копияПечатное издание
187.49 £ (включая НДС 20%)
Разработчик:
Зарубежные/BSI
ICS:
71.040.40 Chemical. Including analysis of gases and surface chemical analysis / Химический анализ. Включая анализ газов
Ключевые слова:
Surface chemistry, Chemical analysis and testing, Surface properties, Secondary, Ions, Mass spectrometry, Spectroscopy, Determination of content, Boron, Concentration (chemical), Single, Crystals, Silicon, Homogeneity, Doping agents, Semiconductor technology, Calibration, Control samples, Test equipment, Specimen preparation, Test methods, Mathematical calculations, Precision, Statistical methods of analysis, Isotopes, Performance testing