Ключевые слова:
Surface chemistry, Chemical analysis and testing, Surface properties, Secondary, Ions, Mass spectrometry, Spectroscopy, Determination of content, Boron, Concentration (chemical), Single, Crystals, Silicon, Homogeneity, Doping agents, Semiconductor technology, Calibration, Control samples, Test equipment, Specimen preparation, Test methods, Mathematical calculations, Precision, Statistical methods of analysis, Isotopes, Performance testing