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BS ISO 14706:2000
Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
32 стр.
Заменен
Печатная копияПечатное издание
220.75 £ (включая НДС 20%)
Разработчик:
Зарубежные/BSI
ICS:
71.040.40 Chemical. Including analysis of gases and surface chemical analysis / Химический анализ. Включая анализ газов
Ключевые слова:
Surface chemistry, Surface properties, Surfaces, Surfactants, Chemical analysis and testing, Contamination, Contaminants, Silicon, Substrates (insulating), X-ray fluorescence spectrometry, X-ray analysis, Fluorimetry, Reflection, Atoms, Density, Epitaxial layers