(812) 309-78-59
(495) 223-46-76
IEC 62047-21:2014 ed1.0
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
26 стр.
Действует
Электронный (pdf)Печатная копия
114.66 CHF (включая НДС 20%)
Разработчик:
Зарубежные/IEC
ICS:
31.080.99 Other semiconductor devices / Полупроводниковые приборы прочие
Описание
IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.