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ASME Micro-Electro-Mechanical Systems(MEMS)
904 стр.
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Описание
PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERINGCONGRESS AND EXPOSITION NOVEMBER 11-16, 2001 NEW YORK,NEW YORKCollection of 128 full-length, peer-reviewed technical papers fromannual symposia. Major areas of discussion include:(a)Micro-Electro-Mechanical Systems: MEMS Commercialization throughTeamwork; Design Methodology, Modeling and, Characterization ofMEMS; Novel Micromachining Processes and Packaging of MEMS; MEMSApplications; Microsensors and Microactuators;Micro-Thermomechanical Devices and Microscale Heat Transfer; MEMSDevice Design and Fabrication; Mechanics and Dynamics of MEMS; MEMSfor Aerospace Applications. (b) Microfluids: Microflows withParticles and Bubbles; Instabilities and Unsteady Phenomena inMicroflows; Molecular Effects and Micro-Biofluids; NovelMicrofluidic Devices; Advanced Microfluidic Diagnostics. (c)Fabrication and Testing of Micro- Electro-Mechanical-Systems.(d)Manufacturing of MEMS and Related Micro/Nano Systems. (e) Microand Mesoscale Energy Systems and Conversion Devices. (f) MedicalApplications of Microsystems. (g) MEMS Packaging.