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BS ISO 14237:2010
Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials
28 стр.
Действует
Печатная копияПечатное издание
257.04 £ (включая НДС 20%)
Разработчик:
Зарубежные/BSI
ICS:
71.040.40 Chemical. Including analysis of gases and surface chemical analysis / Химический анализ. Включая анализ газов
Ключевые слова:
Spectroscopy, Crystals, Precision, Test equipment, Mass spectrometry, Statistical methods of analysis, Chemical analysis and testing, Semiconductor technology, Performance testing, Mathematical calculations, Surface chemistry, Homogeneity, Isotopes, Silicon, Boron, Determination of content, Secondary, Doping agents, Calibration, Control samples, Single, Concentration (chemical), Specimen preparation, Ions, Surface properties