1.1 This practice describes methods for determining the specimen area contributing to the detected signal in X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) when this area is defined by the electron collection lens/aperture system. It is recommended as a useful means of determining the observed specimen area for different conditions of spectrometer operation, verifying adequate specimen alignment, and characterizing the imaging properties of the electron energy analyzer.

1.2 This practice is intended only for spectrometers in which the specimen area excited by X-ray or electron beams is or can be made larger than the specimen area viewed by the analyzer. It is assumed that, under normal conditions of operation, the specimen is excited by a beam of X rays or electrons that can be considered to have a uniform intensity over the specimen area viewed by the analyzer, and the specimen is homogeneous and uniform over the observed area.

1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.