1.1 This practice covers scanning probe microscopy and describes the parameters needed for probe shape and orientation.

1.2 This practice also describes a method for measuring the shape and size of a probe tip to be used in scanning probe microscopy. The method employs special sample shapes, known as probe characterizers, which can be scanned with a probe microscope to determine the dimensions of the probe. Mathematical techniques to extract the probe shape from the scans of the characterizers have been published (2-5).

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.