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ASTM F576-01
Отменен
Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry (Withdrawn 2003)
— 9 стр.
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ASTM F576-01
Отменен
Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry (Withdrawn 2003)
— 9 стр.
ASTM F576-00
Заменен
Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry
— 9 стр.
На этот документ ссылаются
DD ISO/TR 15969:2001
Действует
Surface chemical analysis. Depth profiling. Measurement of sputtered depth
— 22 стр.
ASTM F576-01
Отменен
Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry (Withdrawn 2003)
— 9 стр.
ASTM F576-00
Заменен
Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry
— 9 стр.