BS EN 62047-25:2016

Действует

Semiconductor devices. Micro-electromechanical devices. Silicon based MEMS fabrication technology. Measurement method of pull-press and shearing strength of micro bonding area — 26 стр.

Описание Изменения Ссылки Версии

Ссылочные документы

IEC 62047-15:2015 ed1.0

Отменен

Semiconductor devices - Micro-electromechanical devices - Part 15: Test method of bonding strength between PDMS and glass — 21 стр.

BS EN 62047-19:2013

Действует

Semiconductor devices. Micro-electromechanical devices. Electronic compasses — 32 стр.

BS EN ISO 10012:2003

Действует

Measurement management systems. Requirements for measurement processes and measuring equipment — 32 стр.