BS EN 62047-26:2016

Действует

Semiconductor devices. Micro-electromechanical devices. Description and measurement methods for micro trench and needle structures — 32 стр.

Ссылочные документы

Действует

Geometrical product specifications (gsp). Surface texture. Profile method -nominal characteristics of contact (stylus) instruments — 20 стр.

Действует

Technical product documentation (TPD). Presentation of dimensions and tolerances. General principles — 76 стр.

Действует

Uncertainty of measurement -- Part 3: Guide to the expression of uncertainty in measurement (GUM:1995) — 132 стр.

Действует

Semiconductor devices. Micro-electromechanical devices. Wafer to wafer bonding strength measurement for MEMS — 32 стр.