BS EN ISO 14644-13:2017

Действует

Cleanrooms and associated controlled environments. Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications — 40 стр.

Описание Изменения Ссылки Версии

Ссылочные документы

ISO 14644-1:2015

Действует

Cleanrooms and associated controlled environments -- Part 1: Classification of air cleanliness by particle concentration — 44 стр.

ISO 14644-9:2012

Действует

Cleanrooms and associated controlled environments -- Part 9: Classification of surface cleanliness by particle concentration — 34 стр.