BS EN ISO 14644-8:2013

Действует

Cleanrooms and associated controlled environments. Classification of air cleanliness by chemical concentration (ACC) — 32 стр.

Описание Изменения Ссылки Версии

Ссылочные документы

ISO 14644-6:2007

Действует

Cleanrooms and associated controlled environments -- Part 6: Vocabulary — 44 стр.

ISO 14644-4:2001

Действует

Cleanrooms and associated controlled environments. Part 4. Design, construction and start-up — 58 стр.

ISO 14644-5:2004

Действует

Cleanrooms and associated controlled environments -- Part 5: Operations — 52 стр.

ISO 14644-7:2004

Действует

Cleanrooms and associated controlled environments – Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) — 60 стр.

ISO 14698-1:2003

Действует

Cleanrooms and associated controlled environments -- Biocontamination control -- Part 1: General principles and methods — 38 стр.

ASTM D5127-99

Заменен

Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry — 5 стр.

BS EN ISO 14644-8:2006

Заменен

Cleanrooms and associated controlled environments. Classification of airborne molecular contamination — 30 стр.

На этот документ ссылаются

BS EN ISO 14644-8:2006

Заменен

Cleanrooms and associated controlled environments. Classification of airborne molecular contamination — 30 стр.

BS 8568:2013

Заменен

Cleanroom energy. Code of practice for improving energy efficiency in cleanrooms and clean air devices — 36 стр.