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DIN 50450-1:1987-08

Действует
Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of water impurity in hydrogen, oxygen, nitrogen, argon and helium by using a diphosphorus pentoxide cell — 2 стр.
ICS
71.100.20 Gases. Including compressed air and hydrogen / Газы промышленного применения. Включая сжатый воздух