DIN EN 62047-12:2012-06

Действует

Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (IEC 62047-12:2011); German version EN 62047-12:2011 — 31 стр.

Описание Изменения Ссылки Версии

Ссылочные документы

BS ISO 12107:2003

Действует

Metallic materials. Fatigue testing. Statistical planning and analysis of data — 36 стр.

DIN IEC 62047-12:2010-05

Отменен

Semiconductor devices - Micro-electromechanical devices - Part 12: A method for fatigue testing thin film materials using the resonant vibration of a MEMS structure (IEC 47F/43/CD:2010)