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DIN 50450-4:1993-09

Действует
Testing of materials for semiconductor technology; determination of impurities in carrier gases and dopant gases; determination of C<(Index)1>-C<(Index)3>-hydrocarbons in nitrogen by gas-chromatography — 2 стр.
ICS
71.100.20 Gases. Including compressed air and hydrogen / Газы промышленного применения. Включая сжатый воздух