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DIN 50452-2:1991-03

Отменен
Testing of materials for semiconductor technology; test method for particle analysis in liquids; determination of particles with optical particle counters — 4 стр.
ОписаниеИзмененияСсылкиВерсии

Ссылочные документы

ASTM F658-00
Заменен
Standard Practice for Calibration of a Liquid-Borne Particle Counter Using an Optical System Based Upon Light Extinction — 14 стр.
ASTM F1226-89(1994)e1
Отменен
Standard Test Method for Calibration of Liquid-Borne Particle Counters for Submicrometer Particle Sizing (Withdrawn 2002) — 5 стр.
DIN 50452-2:2009-10
Действует
Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 2: Determination of particles by optical particle counters — 11 стр.

На этот документ ссылаются

DIN 50452-3:1995-10
Действует
Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 3: Calibration of optical particle counters — 6 стр.
DIN 50452-2:2009-10
Действует
Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 2: Determination of particles by optical particle counters — 11 стр.