Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 1: Qualitative estimation of the material and procedure specific influences
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 1: Qualitative estimation of the material and procedure specific influences— 19 стр.
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices— 28 стр.
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures— 13 стр.
