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DIN 50451-2:2003-04

Действует
Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 2: Calcium (Ca), cobalt (Co), chromium (Cr), copper (Cu), Iron (Fe), nickel (Ni) and zinc (Zn) in hydrofluoric acid with plasma-induced emission spectroscopy — 8 стр.
ICS
29.045 Semiconducting materials / Полупроводниковые материалы