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DIN 50451-6:2014-11

Действует
Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 6: Determination of 36 elements in a high-purity ammonium fluoride solution (NH<(Index)4>F) and in etching mixtures of high-purity ammonium fluoride solution containing hydrofluoric acid — 14 стр.
ICS
29.045 Semiconducting materials / Полупроводниковые материалы