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IEC 60050-523:2018 ed1.0

Действует
International Electrotechnical Vocabulary (IEV) - Part 523: Micro-electromechanical devices — 47 стр.
IEC 60050-523:2018 gives the general terminology used for micro-electromechanical devices including the process of production of such devices. It has the status of a horizontal standard in accordance with IEC Guide 108:2006. This terminology is consistent with the terminology developed in the other specialized parts of the IEV.
ICS
31.080.99 Other semiconductor devices / Полупроводниковые приборы прочие
01.040.29 Electrical engineering (Vocabularies) / Электротехника (Словари)