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IEC 60204-33:2009 ed1.0

Действует
Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment — 247 стр.
IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
ICS
25.040.30 Industrial robots. Manipulators / Промышленные роботы. Манипуляторы
29.020 Electrical. Including voltages, general electrical terminology, electrical documentation, electrical tables, safety, fire hazard testing, etc. / Электротехника в целом. Включая напряжение, общую терминологию, электротехническую документацию, электрические таблицы, безопасность, испытания на пожароопасность и т.д.
13.110 Safety of machinery / Безопасность механизмов