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IEC 62047-1:2005 ed1.0

Заменен
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions — 25 стр.
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
ICS
31.080.99 Other semiconductor devices / Полупроводниковые приборы прочие