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IEC PAS 62276:2001 ed1.0

Заменен
Single crystal wafers applied for surface acoustic wave device - Specification and measuring method — 33 стр.
Applies to single crystal wafers intended for manufacturing substrates made of synthetic quartz crystal, lithium niobate, lithium tantalate, lithium tetraborate crystals for surface acoustic wave (SAW) filters and resonators. Lays down specifications and measuring methods.
ICS
31.140 Piezoelectric devices / Пьезоэлектрические и диэлектрические приборы