18/30350530 DC

Действует

BS ISO 21859. Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment — 10 стр.

Описание Изменения Ссылки Версии

Ссылочные документы

ISO 4287:1997/Amd.1:2009

Действует

Geometrical Product Specifications (GPS) -- Surface texture: Profile method -- Terms, definitions and surface texture parameters -- Amendment 1: Peak count number — 6 стр.

ISO 3274:1996

Действует

Geometrical product specifications (gsp). Surface texture. Profile method -nominal characteristics of contact (stylus) instruments — 20 стр.

ISO 18452:2005

Действует

Fine ceramics (advanced ceramics, advanced technical ceramics) -- Determination of thickness of ceramic films by contact-probe profilometer — 14 стр.