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PD ISO/TR 19319:2013

Действует
Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods — 126 стр.
ОписаниеИзмененияСсылкиВерсии

Ссылочные документы

ISO 22493:2008
Заменен
Microbeam analysis -- Scanning electron microscopy -- Vocabulary — 30 стр.
ISO 18516:2006
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Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution — 32 стр.
ISO/IEC Guide 98-3:2008
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Uncertainty of measurement -- Part 3: Guide to the expression of uncertainty in measurement (GUM:1995) — 132 стр.
BS ISO 9334:2007
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Optics and photonics. Optical transfer function. Definitions and mathematical relationships — 48 стр.
BS ISO 9335:1995
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Optics and optical instruments. Optical transfer function. Principles and procedures of measurement — 30 стр.
ASTM E1217-00
Заменен
Standard Practice for Determination of the Specimen Area Contributing to the Detected Signal in Auger Electron Spectrometers and Some X-Ray Photoelectron Spectrometers — 7 стр.
PD ISO/TR 19319:2003
Заменен
Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution, analysis area, and sample area viewed by the analyser — 26 стр.

На этот документ ссылаются

PD ISO/TR 19319:2003
Заменен
Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution, analysis area, and sample area viewed by the analyser — 26 стр.