Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices— 28 стр.
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 1: Qualitative estimation of the material and procedure specific influences
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures— 13 стр.
Geometrical Product Specifications (GPS) - Surface texture: Profile method - Nominal characteristics of contact (stylus) instruments (ISO 3274:1996); German version EN ISO 3274:1997— 15 стр.
Geometrical Product Specifications (GPS) - Surface texture: Profile method; Measurement standards - Part 1: Material measures (ISO 5436-1:2000); German version EN ISO 5436-1:2000— 18 стр.
Geometrical Product Specifications (GPS) - Surface texture: Profile method - Calibration of contact (stylus) instruments (ISO 12179:2000); German version EN ISO 12179:2000— 19 стр.
Geometrical product specifications (GPS) - Surface texture: Areal - Part 601: Nominal characteristics of contact (stylus) instruments (ISO 25178-601:2010); German version EN ISO 25178-601:2010— 25 стр.
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures— 13 стр.
