DIN EN 62047-21:2015-04

Действует

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (IEC 62047-21:2014); German version EN 62047-21:2014 — 16 стр.

Описание Изменения Ссылки Версии

Ссылочные документы

DIN IEC 62047-8:2008-05

Отменен

Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films (IEC 47/1961/CD:2008)

ASTM E1323-89(1994)e1

Заменен

Standard Guide for Evaluating Laboratory Measurement Practices and the Statistical Analysis of the Resulting Data — 3 стр.

DIN EN 62047-21:2012-11

Отменен

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (IEC 47F/127/CD:2012)