DIN 32566:2007-12

Действует

Production equipment for microsystems - Specification for an X-Ray Lithography Mask Support Ring — 9 стр.

Ссылочные документы

DIN EN ISO 1101:2006-02

Отменен

Geometrical Product Specifications (GPS) - Geometrical tolerancing - Tolerances of form, orientation, location and run-out (ISO 1101:2004); German version EN ISO 1101:2005 — 68 стр.

DIN EN ISO 8734:1998-03

Отменен

Parallel pins, of hardened steel or martensitic stainless steel (Dowel pins) (ISO 8734:1997) — 5 стр.