Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 5: Derivation of correction values for optical measuring devices— 18 стр.
Geometrical product specifications (GPS) - Surface texture: Areal - Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments (ISO 25178-605:2014); German version EN ISO 25178-605:2014— 39 стр.
Geometrical product specification (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013); German version EN ISO 25178-604:2013— 44 стр.
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013); German version EN ISO 25178-603:2013— 34 стр.
Geometrical product specifications (GPS) - Surface texture: Areal - Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments (ISO 25178-602:2010); German version EN ISO 25178-602:2010— 40 стр.
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 1: Qualitative estimation of the material and procedure specific influences— 19 стр.
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 5: Derivation of correction values for optical measuring devices
