BS IEC 62047-32. Semiconductor devices. Micro-electromechanical devices. Part 32. Test method for the nonliear vibration of the MEMS resonators— 15 стр.
Semiconductor devices - Micro-electromechanical devices -- Part 25: Silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area (IEC 62047-25:2016) (english version)