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ISO 14644-9:2012

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Cleanrooms and associated controlled environments -- Part 9: Classification of surface cleanliness by particle concentration — 34 стр.
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BS EN 62435-1:2017
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Electronic components. Long-term storage of electronic semiconductor devices. General — 38 стр.
BS EN ISO 14644-13:2017
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Cleanrooms and associated controlled environments. Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications — 40 стр.
BS EN ISO 14644-10:2013
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Cleanrooms and associated controlled environments. Classification of surface cleanliness by chemical concentration — 38 стр.
BS EN ISO 14644-14:2016
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Cleanrooms and associated controlled environments. Assessment of suitability for use of equipment by airborne particle concentration — 30 стр.
ÖNORM EN ISO 14644-13:2018-02
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Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017)