ÖNORM EN ISO 14644-10:2013-06

Действует

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)

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Ссылочные документы

ISO 14644-1:2015

Действует

Cleanrooms and associated controlled environments -- Part 1: Classification of air cleanliness by particle concentration — 44 стр.

ISO 14644-6:2007

Действует

Cleanrooms and associated controlled environments -- Part 6: Vocabulary — 44 стр.

На этот документ ссылаются

DIN EN ISO 14644-13:2017-11

Действует

Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017); German version EN ISO 14644-13:2017 — 44 стр.