ÖNORM EN ISO 14644-13:2018-02

Действует

Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017)

Описание Изменения Ссылки Версии

Ссылочные документы

ISO 14644-8:2013

Действует

Cleanrooms and associated controlled environments -- Part 8: Classification of air cleanliness by chemical concentration (ACC) — 30 стр.

ISO 14644-9:2012

Действует

Cleanrooms and associated controlled environments -- Part 9: Classification of surface cleanliness by particle concentration — 34 стр.

ISO 14644-10:2013

Действует

Cleanrooms and associated controlled environments -- Part 10: Classification of surface cleanliness by chemical concentration — 36 стр.