ASTM F522-94

Заменен

Test Method for Stacking Fault Density of Epitaxial Layers of Silicon by Interference-Contrast Microscopy (Withdrawn 1998) — 4 стр.

Ссылочные документы

Отменен

Standard Test Method for Counting Preferentially Etched or Decorated Surface Defects in Silicon Wafers (Withdrawn 2003) — 4 стр.

Отменен

Testing of materials for semiconductor technology - Determination of defect types and defect densities of silicon epitaxial layers — 10 стр.