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DIN 50441-5:2001-04

Отменен
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 5: Terms of shape and flatness deviation — 11 стр.
ОписаниеИзмененияСсылкиВерсии

Ссылочные документы

DIN 50441-1:1996-07
Отменен
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 1: Thickness and thickness variation — 4 стр.
DIN 50441-3:1985-09
Отменен
Testing of materials for semiconductor technology; measurement of the geometric dimensions of semiconductor slices; determination of flatness deviation of polished slices by means of the multiple beam interference — 5 стр.
ASTM F534-97
Заменен
Standard Test Method for Bow of Silicon Wafers — 3 стр.
ASTM F657-92(1999)
Отменен
Standard Test Method for Measuring Warp and Total Thickness Variation on Silicon Wafers by Noncontact Scanning (Withdrawn 2003) — 10 стр.
ASTM F1451-92(1999)
Отменен
Standard Test Method for Measuring Sori on Silicon Wafers by Automated Noncontact Scanning (Withdrawn 2003) — 12 стр.
DIN 50441-5:1998-05
Отменен
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 5: Terms of shape and flatness deviation — 10 стр.

На этот документ ссылаются

DIN 5040-3:1977-05
Действует
Luminaires (lighting fittings); luminaires for outdoor lighting, concepts, classification — 2 стр.
DIN 5044-1:1981-09
Отменен
Stationary traffic lighting; street lighting for automobile traffic — 14 стр.
DIN 67523:1970-07
Отменен
Lighting of pedestrian crossings; general instructions — 2 стр.
DIN 67505:1975-10
Отменен
Lighting of dental operatories and laboratories; recommendations — 3 стр.
DIN 67525:1973-01
Отменен
Lighting of unterground railway installations; guiding principles — 4 стр.
DIN 50441-1:1996-07
Отменен
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 1: Thickness and thickness variation — 4 стр.
DIN 50441-5:1998-05
Отменен
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 5: Terms of shape and flatness deviation — 10 стр.
BS EN 50513:2009
Действует
Solar wafers. Data sheet and product information for crystalline silicon wafers for solar cell manufacturing — 36 стр.