Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy— 32 стр.
Cleanrooms and associated controlled environments. Assessment of suitability for use of equipment and materials by airborne chemical concentration— 28 стр.
Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017)
