Testing of semi-conducting inorganic materials; estimation of the crystal perfection of monocrystalline silicon samples on etched {111} surfaces— 7 стр.
Testing of materials for semiconductor technology; detection of crystal defects in monocrystalline silicon using etching techniques on {111} and {100} surfaces— 9 стр.
Testing of materials for semiconductor technology; detection of crystal defects in monocrystalline silicon using etching techniques on {111} and {100} surfaces— 9 стр.
