Testing of materials for semiconductor technology; measurement of the geometric dimensions of semiconductor slices; diameter and flat depth of slices— 4 стр.
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 1: Thickness and thickness variation— 4 стр.
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 4: Slice diameter, diamter variation, flat diameter, flat length, flat depth— 8 стр.
