DIN 50446:1995-09

Отменен

Testing of materials for semiconductor technology - Determination of defect types and defect densities of silicon epitaxial layers — 10 стр.

Описание Изменения Ссылки Версии

Ссылочные документы

DIN 50433-1:1976-12

Отменен

Testing of semi-conducting inorganic materials; determining the orientation of single crystals by means of X-ray diffraction — 3 стр.

DIN 50434:1986-02

Отменен

Testing of materials for semiconductor technology; detection of crystal defects in monocrystalline silicon using etching techniques on {111} and {100} surfaces — 9 стр.

DIN 50436:1976-10

Отменен

Testing of semi-conducting inorganic materials - Measurement of the metalurgic thickness of epitaxial layers of silicon by the stacking fault method

DIN 50441-2:1982-04

Отменен

Testing of materials for semiconductor technology; measurement of the geometric dimensions of semiconductor slices; testing of edge rounding — 2 стр.

DIN 50443-1:1988-07

Отменен

Testing of materials for use in semiconductor technology; detection of crystal defects and inhomogeneities in silicon single crystals by X-ray topography — 10 стр.

DIN 50454-1:1991-11

Отменен

Testing of materials for semiconductor technology; determination of the dislocations etch pits density in monocrystals of III-V-compound semiconductors; galliumarsenide — 4 стр.

ASTM F471-76(1996)

Заменен

Standard Terminology Relating to Combination Locks — 2 стр.

ASTM F1548-94

Заменен

Standard Specification for the Performance of Fittings for Use with Gasketed Mechanical Couplings Used in Piping Applications — 4 стр.

ASTM F522-94

Заменен

Test Method for Stacking Fault Density of Epitaxial Layers of Silicon by Interference-Contrast Microscopy (Withdrawn 1998) — 4 стр.

ASTM F523-93(1997)

Заменен

Standard Practice for Unaided Visual Inspection of Polished Silicon Wafer Surfaces — 5 стр.

ASTM F815-88(1993)e1

Отменен

Test Method for Detection of Epitaxial Spikes (Withdrawn 1999) — 2 стр.

ASTM F928-93(1999)

Заменен

Standard Test Methods for Edge Contour of Circular Semiconductor Wafers and Rigid Disk Substrates — 4 стр.

ASTM F1049-00

Заменен

Standard Practice for Shallow Etch Pit Detection on Silicon Wafers — 4 стр.